The project addresses two sensor technologies with Micro-Electro-Mechanical System (MEMS)-based metal oxide semiconductor (MOS) gas sensors and Silicon Carbide-based gas sensitive field effect transistors (SiC GasFET). Gas sensitive layers for both sensor technologies are realized by Pulsed Laser Deposition (PLD) for well-defined, stable and highly sensitive nanostructured layers. These are combined with gas pre-concentration based on MIPs (molecular imprinted polymers) and MOFs (metal-organic frameworks) to boost the sensitivity of the overall system. Dynamic operation of the gas sensor elements by temperature cycling combined with pattern recognition techniques is employed to further boost sensitivity and selectivity and expanded to optimally use the gas preconcentration. The project thus combines physical and chemical nanotechnologies for extremely sensitive and selective gas sensing, MEMS technologies for low-power operation as well as low-cost manufacture and finally dynamic operating modes together with advanced signal processing for unrivalled system performance. Sensor elements and systems are evaluated under controlled lab conditions derived from priority application scenarios.
The final demonstration of the SENSIndoor technology will include field tests with sensor systems integrated into building control systems.
Learn more about the individual work packages.